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ALD/ALE 2017 to Showcase Advances in Atomic-Scale Processing

The demands of our modern world for more connectivity, functionality, and capacity from our electronic devices – alongside the seemingly endless imagination for new applications …

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Tech Brief: A Look at Atomic Layer Deposition (ALD)

Imagine being able to deposit a film of material just a few atomic layers at a time. As impossible as that sounds, atomic layer deposition …

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Tech Brief: All About ALE

Greek philosopher Democritus (460-370 BC) first proposed the existence of an ultimate particle, which he described as “atomos.” He probably never dreamed that one day …

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ALD Conference and ALE Workshop Explore Nanoscale Processing

Chip designs are changing. Features are shrinking to incredibly small dimensions and radically new device architectures are being devised to supply consumers with smaller, more …

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Journal Papers Showcase Research at Lam

From materials research to plasma fundamentals, Lam’s technologists are contributing to practical and theoretical developments in their fields. One way they help advance technology and …

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Every Atom Matters at These Conferences

Experts in the atomic-scale processing community will soon assemble at the AVS ALD 2015 Conference and the ALE Workshop to share advances in fundamental understanding …

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Tastes of ALE: New Articles on Atomic Layer Etching

Interest in atomic layer etching (ALE) is intensifying as it emerges as an enabling technique for advanced etch applications. As features on a chip continue …

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Lam to Discuss Advances in Atomic-Scale Processing at Fall ECS

Experts from Lam’s deposition and etch product groups have been invited to speak on atomic-scale processing at the 2014 Electrochemical Society (ECS) and Sociedad Mexicana …

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Lam Awards Best Student Paper at AVS ALD Conference

Researchers from around the world come together each year at the AVS International Conference on Atomic Layer Deposition (ALD) to share advances in this critical …

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Building Chips a Few Atoms at a Time

Did you know we’re building semiconductor chips with atoms? The tiny features on advanced devices are getting so small that atomic-scale processes are needed to …

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New Workshop Spotlights Atomic Layer Etch

This spring Lam Research was among a small number of equipment companies to join device manufacturers, universities, and research institutions in San Francisco at SEMATECH’s …

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