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Smart Starts at SEMICON Korea

January 10, 2019
Joanne Lee |
Category:
Technology

As one of the largest tradeshows and exhibitions in the region, SEMICON Korea brings together the best and the brightest of the semiconductor industry. Held from January 23 to January 25 at COEX, Seoul, the exhibition will showcase the latest semiconductor materials, equipment, and technology. The semiconductor technology symposium is one of the many opportunities to hear experts speak on some of the latest advances in the industry today.

Lam Research is proud to be the exclusive sponsor of the SEMI Technology Symposium (STS) with several talks throughout the event. In addition, Lam is also sponsoring the Industry Leadership dinner on Wednesday, January 23. Lam experts will present emerging technologies and innovations at the talks listed below.

Atomic Layer Etch for Mitigation of EUV Resist Stochastic Defects
Rich Wise, Ph.D.
STS S1. Advanced Lithography
Wednesday, January 23, 4:20 PM    

Addressing the Resurgence of 200 mm and ≤28 nm, 300 mm Capacity Demand through Technical Innovation and Improvements in Capital Efficiency
Michelle Bourke
STS S3. Device Technology
Wednesday, January 23, 4:30 PM

Effect of Pulsed RF Plasma for Etch Application
DongSoo Lee, Ph.D.
Workforce Pavilion – Meet the Experts
Thursday, January 24, 11:00 AM

Emerging Memories: Etching Challenges and Solutions
Thorsten Lill, Ph.D.
STS S4. Plasma Science and Etching Technology
Thursday, January 24, 2:00 PM

Smart Manufacturing and Machine Learning: Process Control in 3D
David Fried, Ph.D.
Smart Manufacturing Forum
Thursday, January 24, 2:05 PM

Process Variation Studies and the Impact on Electrical Performance
Daebin Yim
STS S4. Plasma Science and Etching Technology
Thursday, January 24, 4:00 PM

Mentoring 4: Process Development
Coby Lee
Workforce Pavilion – Meet the Experts
Friday, January 25, 3:30PM

For more information about the show, including complete schedules and registration details, please visit the SEMICON Korea website.

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