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Cool Chemistry on Stage at ECS Fall Meeting

September 28, 2015 | Technology

What do thin film deposition, plasma etch, and wafer cleaning have in common? They all involve cutting-edge chemistry and they will all be on stage at the upcoming 228th ECS Meeting hosted by the Electrochemical Society. Held October 11-16 in Phoenix, Arizona, this major international conference focuses on electrochemical and solid-state science and technology. Researchers, engineers, and industry leaders from around the world will gather to share advances in the theory and practice of subjects such as dielectric science and materials, electrochemical deposition, and electronic materials and processing.

Continuing our support of these important technologies, Lam is pleased to be a gold sponsor of two technical symposia: Atomic Layer Deposition Applications and Semiconductor Cleaning Science and Technology. We will also have five technical presentations, including two invited talks, covering topics from electroless deposition to atomic layer etching (ALE) to advanced wafer cleaning:


(Invited) Electroless Deposition of Ruthenium Using Sodium Borohydride Reducing Agent: A Mechanistic Study Using Electrochemical Quartz Crystal Microbalance
A. Joi (Lam Research); A. Zieliene, E. Norkus, L. Tamasauskaite-Tamasiunaite (Center for Physical Sciences and Technology); Y. Dordi (Lam Research)
Tuesday, October 13, 4:20 PM

(Invited) Divide et Impera: Towards New Frontiers with Atomic Layer Etching
T. Lill, K.J. Kanarik, S.S.H. Tan, M. Shen, Y. Pan, J. Marks, V. Vahedi, R.A. Gottscho
Thursday, October 15, 11:00 AM

Electroless Deposition of Ferromagnetic CoxFe1-x Alloys Using Metal Ion Reducing Agent
A. Joi (Lam Research), E. Chen (UC Berkeley), Y. Dordi (Lam Research)
Tuesday, October 13, 9:20 AM

Dewetting Model Study on a Spinning Substrate – Challenges for Low Chemical Consumption
K.I. Sano, D. Mui, M. Kawaguchi
Tuesday, October 13, 10:10 AM

Selective Removal of Native SiO2 Using XeF2
A. Hinckley, P. Mancheno-Posso (University of Arizona); S. Lai (Lam Research); A.J. Muscat (University of Arizona)
Thursday, October 15, 8:40 AM


Complete schedules and registration information can be found on the ECS website. We look forward to seeing you at the conference.



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