Silicon chip manufacturing has always included etching as a critical processing step. But, increasingly, extremely high-aspect-ratio etching has been needed for 3D flash and DRAM chips, which have revolutionized the capabilities of everyday electronics such as smartphones, laptop computers, and the many other electronic devices that we use on a daily basis. This has increased the demands on etching equipment, and Lam’s high-performance etch tools have been critical enablers of the success of these processes. 

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