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Enabling Advanced ICs with Multiple Patterning

Used to extend the capabilities of conventional lithography, multiple patterning is a process of overlaying patterns of larger dimensions to achieve smaller and/or more tightly …

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Tech Brief: A Look at Atomic Layer Deposition (ALD)

Imagine being able to deposit a film of material just a few atomic layers at a time. As impossible as that sounds, atomic layer deposition …

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SEMICON Southeast Asia to Highlight Back-End and IoT Opportunities

Southeast Asia is a major hub for the chip industry’s assembly, packaging, and test services – back-end manufacturing processes that are becoming an increasingly important …

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Technology and Economic Considerations for Panel-Level Fan-Out Packaging

Panel-level fan-out chip manufacturing – using large square or rectangular substrates instead of wafers – is being developed as a means to lower the cost …

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Gearing Up for SEMICON China 2017

In recent years, SEMICON China has become the semiconductor industry’s largest annual tradeshow, with much of its popularity likely due to the region’s growing chipmaking …

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Focus on Next-Gen Chipmaking at SPIE Advanced Lithography Symposium

It really is remarkable how our favorite tech products continue to become more compact and powerful, with today’s nanoscale chipmaking quite literally pushing the limits …

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SEMICON Korea to Explore Latest Technology Advances

For its 30th anniversary, SEMICON Korea anticipates hosting its largest show ever, with an estimated 40,000 attendees converging at COEX in Seoul on February 8-10, …

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Tech Brief: Primer on Packaging

Ever open the body of your smartphone (perhaps unintentionally) and see small, black rectangles stuck on a circuit board? Those black rectangles are packaged chips. …

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SEMICON Japan to Showcase Manufacturing Innovations

This year marks the 40th anniversary for SEMICON Japan, one of the most extensive international exhibitions of semiconductor equipment and materials. Each SEMI tradeshow has …

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Continued Scaling with Multiple Patterning

Did you know that different patterns require different types of multiple patterning? Today’s advanced chips are more complex than ever before, with transistors and other …

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Tech Brief: All About ALE

Greek philosopher Democritus (460-370 BC) first proposed the existence of an ultimate particle, which he described as “atomos.” He probably never dreamed that one day …

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AVS Symposium – Plasma Research and Thin Film Science

State-of-the-art advances in plasma research and thin film science will be discussed at the AVS 63rd International Symposium and Exhibition, being held November 6-11 in …

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PRiME 2016 Conference Preview

Electrochemistry and solid-state science and technology will come together at the PRiME 2016 Meeting, held October 2-7 in Honolulu, Hawaii. One of the largest research …

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Tech Brief: FinFET Fundamentals

Transistors are at the heart of our cherished electronics. Millions, or even billions, of these tiny switches go to work for us when we check …

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New Atomic Layer Etching Capability Enables Continued Device Scaling

With the introduction of Lam’s latest Flex™ dielectric etch system, we have expanded our atomic layer etching (ALE) portfolio to include both conductor and dielectric …

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SEMICON Taiwan to Focus on Industry Future

The semiconductor manufacturing community is gearing up for SEMICON Taiwan, the largest microelectronics event in Taiwan, which is expected to attract more than 40,000 visitors …

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Innovative Tungsten ALD Process Provides Pathway to New Memory Chip Production

Addressing critical needs for next-generation 3D NAND and DRAM devices, Lam has developed the industry’s first all-atomic layer deposition (ALD) low-fluorine tungsten (LFW) fill process …

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Multipatterning Poses Process Challenges

Multiple patterning is an innovative approach to scaling semiconductors, but it also poses significant challenges controlling process variations. Lam’s Rick Gottscho, executive vice president of …

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ALD Conference and ALE Workshop Explore Nanoscale Processing

Chip designs are changing. Features are shrinking to incredibly small dimensions and radically new device architectures are being devised to supply consumers with smaller, more …

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Evolution of Uniformity Control: Looking Back and Peeking Ahead

The semiconductor industry has long relied on the development of innovative device architectures and technologies to continue device scaling. Making these a reality in production, …

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