Continued Scaling with Multiple Patterning

November 28, 2016 , Industry, Technology
(Video) Did you know that different patterns require different types of multiple patterning? Today’s advanced chips are more complex than ever before, with transistors and other structures that are smaller and more densely packed. To create those tiny features, chipmakers have developed multiple multiple patterning strategies that enable much finer dimensions than current lithography can achieve.

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